JPH0446461B2 - - Google Patents

Info

Publication number
JPH0446461B2
JPH0446461B2 JP59007678A JP767884A JPH0446461B2 JP H0446461 B2 JPH0446461 B2 JP H0446461B2 JP 59007678 A JP59007678 A JP 59007678A JP 767884 A JP767884 A JP 767884A JP H0446461 B2 JPH0446461 B2 JP H0446461B2
Authority
JP
Japan
Prior art keywords
pressure
support
pressure receiving
receiving structure
wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59007678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60152073A (ja
Inventor
Yoshihiko Nagayasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Corporate Research and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Corporate Research and Development Ltd filed Critical Fuji Electric Corporate Research and Development Ltd
Priority to JP59007678A priority Critical patent/JPS60152073A/ja
Publication of JPS60152073A publication Critical patent/JPS60152073A/ja
Publication of JPH0446461B2 publication Critical patent/JPH0446461B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Pressure Sensors (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
JP59007678A 1984-01-19 1984-01-19 圧覚センサ Granted JPS60152073A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59007678A JPS60152073A (ja) 1984-01-19 1984-01-19 圧覚センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59007678A JPS60152073A (ja) 1984-01-19 1984-01-19 圧覚センサ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP5142407A Division JPH0793445B2 (ja) 1993-06-15 1993-06-15 圧覚センサ

Publications (2)

Publication Number Publication Date
JPS60152073A JPS60152073A (ja) 1985-08-10
JPH0446461B2 true JPH0446461B2 (en]) 1992-07-30

Family

ID=11672445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59007678A Granted JPS60152073A (ja) 1984-01-19 1984-01-19 圧覚センサ

Country Status (1)

Country Link
JP (1) JPS60152073A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0793445B2 (ja) * 1993-06-15 1995-10-09 株式会社富士電機総合研究所 圧覚センサ
DE102006031635A1 (de) * 2006-07-06 2008-01-17 Werthschützky, Roland, Prof. Dr.-Ing. Minaturisierbarer Kraftsensor zum Erfassen eines Kraftvektors
CN108496055B (zh) * 2016-04-15 2020-10-27 惠普发展公司，有限责任合伙企业 三维印刷的测力传感器部件

Also Published As

Publication number Publication date
JPS60152073A (ja) 1985-08-10

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